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- Align Stage Module for 10 axes (5-axes 2 set)
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10 axes (5 axes per side, 2set) stage unit for alignment system
1. Alignment drive of X, Y, Z(Optical Axis), ¥Èx, ¥Èy axis combination
2. Compact Size
3. Precise for repeatable fine movement
4. 30% smaller than former model
Align Stage Module for 10 axes (5-axes 2 set)