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Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
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Alignment Stage Specification
1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
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Alignment Stage Specification
1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
-
-
Alignment Stage Specification
1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
-
-
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. 3D encoder option for High-precision
4. Provide integrated system by using S / W and driver controller applying self-precision compensation control algorithm
-
-
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
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1. Max load capacity is 2T with high stiffness
2. Accurate implementation with integrated ball guide block
3. Q sensor (3D encorder), Drive & controller
(High precision can be realized with 3D encoder option)
4. Large size Stage of 1000 x 1000mm
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10 axes (5 axes per side, 2set) stage unit for alignment system
1. Alignment drive of X, Y, Z(Optical Axis), ¥Èx, ¥Èy axis combination
2. Compact Size
3. Precise for repeatable fine movement
4. 30% smaller than former model
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6 axes compact miniature motorized stage
1. High precision
2. Light weight, High rigidity
3. High resolution
4. Reasonable Price