Motorized Stage

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CAAR-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail °ßÀû¹®ÀÇ

AA-200-3S

Alignment Stage Specification

1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
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AA-300-3S

Alignment Stage Specification

1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
Detail °ßÀû¹®ÀÇ

AA-400-3S

Alignment Stage Specification

1. Alignment drive of X, Y and ¥È axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
Detail °ßÀû¹®ÀÇ

HAA-350

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. 3D encoder option for High-precision
4. Provide integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail °ßÀû¹®ÀÇ

HAA-450

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail °ßÀû¹®ÀÇ

LAA4-1000

1. Max load capacity is 2T with high stiffness
2. Accurate implementation with integrated ball guide block
3. Q sensor (3D encorder), Drive & controller
(High precision can be realized with 3D encoder option)
4. Large size Stage of 1000 x 1000mm
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Align Stage Module for 10 axes (5-axes 2 set)

10 axes (5 axes per side, 2set) stage unit for alignment system

1. Alignment drive of X, Y, Z(Optical Axis), ¥Èx, ¥Èy axis combination
2. Compact Size
3. Precise for repeatable fine movement
4. 30% smaller than former model
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MA6-S

6 axes compact miniature motorized stage

1. High precision
2. Light weight, High rigidity
3. High resolution
4. Reasonable Price
Detail °ßÀû¹®ÀÇ