Motorized Stage

Ȩhome > Motorized Stage > Align Stage(Detail)

 

À̹ÌÁö»ó¼¼º¸±â
HAA-350
Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. 3D encoder option for High-precision
4. Provide integrated system by using S / W and driver controller applying self-precision compensation control algorithm