Motorized Stage

홈home > Motorized Stage > Align Stage > CAA(Detail)

이미지상세보기
CAA4-200
Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm