Motorized Stage

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3 제품이미지

CAA-200

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
2 제품이미지

CAA-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
1 제품이미지

CAA-175

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm