no | Image | Details |
---|---|---|
11 | ![]() |
CAA-175-3S
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
10 | ![]() |
CAA-200-3S
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
9 | ![]() |
CAA-175-1S
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
8 | ![]() |
CAA4-175
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. 4 axes with 4 motors 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
7 | ![]() |
CAAR-175
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
6 | ![]() |
CAA-200-1S
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
5 | ![]() |
CAA4-200
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
4 | ![]() |
CAAR-200
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
3 | ![]() |
CAA-300
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
2 | ![]() |
CAA4-300
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |
1 | ![]() |
CAAR-300
Compact Alignment Stage Specification
1. Alignment drive of X, Y, ¥È axis combination 2. Compact Size 3. High-precision implementation of 3D Encoder option 4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm |