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AA-400-3S

				

					Alignment Stage Specification



1. Alignment drive of X, Y and Θ axes combination on the same plane

2. Space-saving design with low height

3. High precision positioning				

			

			

								
					
DRAWING

				
				
				
ESTIMATE
 
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 Annotation 1 : The amount of rotation is only satisfied at the center position of the stage. It is not satisfied when rotating after 
                     linear movement
 Annotation 2 : Ballscrew grade is choosable. C5 precise specification is within parentheses
 
 
 
			

		

	

	








				
 
			

			

		

		

	


	

			






				

					
					
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