Motorized Stage

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HAA-450
Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm

 

 Annotation 1 : The amount of rotation is only satisfied at the center position of the stage. It is not satisfied when rotating after

                     linear movement

 Annotation 2 : Ballscrew grade is choosable. C5 precise specification is within parentheses