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home > Motorized Stage > Align Stage(Detail)
- HAA-450
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Compact Alignment Stage Specification
1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Annotation 1 : The amount of rotation is only satisfied at the center position of the stage. It is not satisfied when rotating after
linear movement
Annotation 2 : Ballscrew grade is choosable. C5 precise specification is within parentheses
