Motorized Stage

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CAA-200

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의

CAA-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의

HAA-450

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의

AA-200

Alignment Stage Specification

1. Alignment drive of X, Y and Θ axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
Detail 견적문의

AA-300

Alignment Stage Specification

1. Alignment drive of X, Y and Θ axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
Detail 견적문의

AA-400

Alignment Stage Specification

1. Alignment drive of X, Y and Θ axes combination on the same plane
2. Space-saving design with low height
3. High precision positioning
Detail 견적문의

CAA-175

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의

HAA-350

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. 3D encoder option for High-precision
4. Provide integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의

LAA4-1000

1. Max load capacity is 2T with high stiffness
2. Accurate implementation with integrated ball guide block
3. Q sensor (3D encorder), Drive & controller
(High precision can be realized with 3D encoder option)
4. Large size Stage of 1000 x 1000mm
Detail 견적문의

UCAA-140-3-S7

Compact Alignment Stage Specification

1. Alignment drive of X, Y, Θ axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
Detail 견적문의